A MEMS - CMOS Tri - Axial Rate Gyroscope Controlled Using a Time - Multiplexed Sensor

This paper presents a novel tri-axial rate gyroscope design. It reviews the physics of the gyroscope and specifies the application domain for the gyro. The design is then presented. It features a unique method of operation; CMOS metal layers are used for sensing and activation for all three axes. This method was previously thought of for sensing z-axis vibrations but not activation of z-axis vibrations. The paper continues with coverage of the electronics necessary to support the activation and sensing of the gyro. The electronics are unique because of the direct inclusion of the sensing capacitance in a switch capacitor amplifier. They are also unique because each activation and sensing mode is time multiplexed. A further original idea is to apply a braking stage between each sensing and activation stage to allow for faster axial measurement transitions. A suggested foundry to implement the proposed design is given last.